★ Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★ Material-Stainless Steel
Model No. |
CXN80 |
|||||
Mechanical Spec. |
Table Size (mm) |
80X80 |
||||
Travel Stroke (mm) |
30 |
50 |
75 |
100 |
||
Drive Type |
Ball Screw Ø8,lead 1mm |
Ball Screw Ø8,lead 2mm |
||||
Rail |
Circular Linear Ball Guiding |
|||||
Stage Material / Surface Treatment |
Stainless Steel / Nickel plating |
|||||
Accuracy Level |
OP:Ultra Precision |
|||||
Wiring Method |
N:GMT Standard |
|||||
Precision Spec. |
Resolution(Pulse) (µm) |
M: 1 (Full);0.5 (Half) J: 2 (Full);1 (Half) |
M: 2 (Full);1 (Half) J: 4 (Full);2 (Half) |
|||
Max. Speed(Full Step) (mm/sec) |
15 |
30 |
||||
Positioning Precision (µm) |
5 |
7 |
10 |
|||
Repeatability Precision(µm) |
±0.5 |
|||||
Multi-point Repeatability Precision(µm) |
A: 1.5 / B: 1 |
|||||
Load Capacity (Kgf) |
16 |
|||||
Missed Step (µm) |
1 |
|||||
Moment Stiffness |
Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm) |
|||||
Pitch / Yaw |
Pitch: < 20" / Yaw: < 15" |
|||||
Parallelism (µm) |
20 |
|||||
Dynamic Straightness (µm) |
2 |
4 |
||||
Dynamic Parallelism (µm) |
10 |
|||||
Electrical Spec. |
Motor |
Type / Shaft Numbers |
M: 5-phase stepper high-resolution motor / ☐28 double shafts J: 5-phase stepper motor / ☐28 double shafts |
|||
Brand / Model |
M: Orientalmotor / PK523HPMB J: Orientalmotor / PKP523N12B |
|||||
Driver Brand / Model |
Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options) |
|||||
Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS |
||||
Controller Side Connector |
15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options) |
|||||
Sensor |
Origin Sensor |
Photoelectric sensor GMT-sensor |
||||
Limit Sensor |
||||||
Origin Approximation Sensor |
N / A |
|||||
Power Voltage |
24V±10% |
|||||
Control Output |
NPN open collector output under 24V 8mA |
|||||
Output Control |
Testing (sensing):output transistor OFF (closed) |
Multi-point repeated positioning accuracy |
♦ Accuracy measurement description 1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process. |
System Configuration Diagram |
♦ For detailed specifications, please read the description for the stage and connecting cable. ♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction: Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor/driver |
咨询 - CXN80 - Ultra Precision