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Product outline
Ideal for incorporating into semiconductor manufacturing equipment!
Siloxane-free loadcell
At a manufacturing site of semiconductors, an equipment which does not let silicone resin generate siloxane is essential.
UWR is a beam type loadcell.
Taking into account the applications around silicon wafer, the Teflon sheathed cable is used.
Specifications
| Specification | UWR-10N |
|---|---|
| Rated Capacity | 10 N |
| Rated Output | Approx. 0.5 mV/V |
| Safe Overload | 300% R.C. |
| Zero Balance | ±10% R.O. |
| Non-linearity | 0.03% R.O. |
| Hysteresis | 0.03% R.O. |
| Repeatability | 0.02% R.O. |
| Compensated Temperature Range | 0 to +50°C |
| Safe Temperature Range | −10 to +70°C |
| Temperature Effect on Zero | 0.5% R.O./10°C |
| Temperature Effect on Span | 0.2% R.O./10°C |
| Input Resistance | Approx. 1000 Ω |
| Output Resistance | Approx. 1000 Ω |
| Recommended Excitation Voltage | 5 V |
| Insulation Resistance (DC 50 V) | 1000 MΩ or more |
| Cable | φ2 4-conductor Teflon sheathed cable (3 m)Cable end: 5 wires |
| Deflection at Rated | 0.04 mm |
| Natural Frequency | 2.5 kHz |
| Weight | Approx. 40 g (not including cable) |
| Load Cell Material | Aluminum alloy |
Example of use & Wiring diagram
External dimension
Inquiry - UWR (Beam Type)
