A6E-6700S

Category: Motorized Stages

Description

Model No.	Specification	Value
A6E-6700S	Axial	X
A6E-6700S	L	AX7050-S2PL
A6E-6700S	R	AX7050-S2PR
A6E-6700S	Travel Stroke	50 mm
A6E-6700S	Screw lead	1 mm
A6E-6700S	Reduction ratio	N/A
A6E-6700S	Motor Specifications	CVK544BK
A6E-6700S	Decomposition Energy	2 μm (Full)
A6E-6700S	Positioning Precision	5 μm
A6E-6700S	Repeatability Precision	±0.5 μm
A6E-6700S	Axial	Y
A6E-6700S	L	AX7050-S2PL
A6E-6700S	R	AX7050-S2PR
A6E-6700S	Travel Stroke	50 mm
A6E-6700S	Screw lead	1 mm
A6E-6700S	Reduction ratio	N/A
A6E-6700S	Motor Specifications	CVK523BK
A6E-6700S	Decomposition Energy	2 μm (Full)
A6E-6700S	Positioning Precision	5 μm
A6E-6700S	Repeatability Precision	±0.5 μm
A6E-6700S	Axial	Z
A6E-6700S	L	AZ7010-S6PL
A6E-6700S	R	AZ7010-S6PR
A6E-6700S	Travel Stroke	10 mm
A6E-6700S	Screw lead	1 mm(斜率1:2)
A6E-6700S	Reduction ratio	N/A
A6E-6700S	Motor Specifications	Decomposition Energy
A6E-6700S	Decomposition Energy	1 μm (Full)
A6E-6700S	Positioning Precision	5 μm
A6E-6700S	Repeatability Precision	±0.5 μm
A6E-6700S	Axial	θz
A6E-6700S	L	AXG6-75VM-R
A6E-6700S	R	AXG6-75VM-L
A6E-6700S	Travel Stroke	±8°
A6E-6700S	Screw lead	N/A
A6E-6700S	Reduction ratio	1/225
A6E-6700S	Motor Specifications	Decomposition Energy
A6E-6700S	Decomposition Energy	0.0032° (Full)
A6E-6700S	Positioning Precision	N/A
A6E-6700S	Repeatability Precision	±0.003°
A6E-6700S	Axial	θx
A6E-6700S	L	AXG6-100VM-R
A6E-6700S	R	AXG6-100VM-L
A6E-6700S	Travel Stroke	±6°
A6E-6700S	Screw lead	N/A
A6E-6700S	Reduction ratio	1/292
A6E-6700S	Motor Specifications	Decomposition Energy
A6E-6700S	Decomposition Energy	0.0025° (Full)
A6E-6700S	Positioning Precision	N/A
A6E-6700S	Repeatability Precision	±0.003°
A6E-6700S	Axial	θy
A6E-6700S	L	AXG4-40VM-L
A6E-6700S	R	AXG4-40VM-R
A6E-6700S	Travel Stroke	±8°
A6E-6700S	Screw lead	N/A
A6E-6700S	Reduction ratio	1/240
A6E-6700S	Motor Specifications	Decomposition Energy
A6E-6700S	Decomposition Energy	0.003° (Full)
A6E-6700S	Positioning Precision	N/A
A6E-6700S	Repeatability Precision	±0.003°

Multi-point repeated positioning accuracy

♦ Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦ Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

System Configuration Diagram

♦ For detailed specifications, please read the description for the stage and connecting cable.

♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.