Model No. |
A6E-6700S |
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Axial |
X |
Y |
Z |
θz |
θx |
θy |
L |
AX7050-S2PL |
AX7050-S2PR |
AZ7010-S6PL |
AXG6-75VM-R |
AXG6-100VM-R |
AXG4-40VM-L |
R |
AX7050-S2PR |
AX7050-S2PL |
AZ7010-S6PR |
AXG6-75VM-L |
AXG6-100VM-L |
AXG4-40VM-R |
Travel Stroke |
50 mm |
50 mm |
10 mm |
± 8° |
± 6° |
± 8° |
Screw lead |
1 mm |
1 mm |
1 mm(斜率1:2) |
N/A |
N/A |
N/A |
Reduction ratio |
N/A |
N/A |
N/A |
1/225 |
1/292 |
1/240 |
Motor Specifications |
CVK544BK |
CVK523BK |
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Decomposition Energy |
2 μm (Full) |
2 μm (Full) |
1 μm (Full) |
0.0032° (Full) |
0.0025° (Full) |
0.003° (Full) |
Positioning Precision |
5 μm |
5 μm |
5 μm |
N/A |
N/A |
N/A |
Repeatability Precision |
± 0.5 μm |
± 0.5 μm |
± 0.5 μm |
± 0.003° |
± 0.003° |
± 0.003° |
Multi-point repeated positioning accuracy |
♦ Accuracy measurement description 1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual ♦ Precision introduction 1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process. |
System Configuration Diagram |
♦ For detailed specifications, please read the description for the stage and connecting cable. ♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog. ♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction: Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor/driver |
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