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AX60 - Ultra Precision



★Guide-Crossed-roller Guide, In structure, V-groove and crossed roller acquire movement in high accuracy and capacity by linear transmission to act a high precision movement and load capacity performance.
★Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★Material-Aluminum Alloy

 
Model No. Specification Value
AX60-A2OP Table Size (mm) 60 × 60
AX60-A2OP Travel Stroke (mm) 20
AX60-A2OP Drive Type Ball Screw Ø6,lead 1mm
AX60-A2OP Rail Crossed-roller Bearing
AX60-A2OP Stage Material / Surface Treatment Aluminum Alloy / Black anodized
AX60-A2OP Main Unit Weight (Kgs) 0.64
AX60-A2OP Coupling FAMS16-5*5
AX60-A2OP Accuracy Level OP:Ultra Precision
AX60-A2OP Wiring Method R : Right wiring (Standard);L : Left wiring
AX60-A2OP Resolution(Pulse) (µm) M: 2.5 (Full);1.25 (Half) / J: 5 (Full);2.5 (Half)
AX60-A2OP Max. Speed(Full Step) (mm/sec) 10
AX60-A2OP Positioning Precision (µm) 5
AX60-A2OP Repeatability Precision(µm) ±0.3
AX60-A2OP Load Capacity (Kgf) 6
AX60-A2OP Missed Step (µm) 1
AX60-A2OP Moment Stiffness Pitch: 0.18 / Yaw: 0.14 / Rolling: 0.1 ("/N-cm)
AX60-A2OP Pitch / Yaw Pitch: < 20" / Yaw: < 15"
AX60-A2OP Parallelism (µm) 30
AX60-A2OP Dynamic Straightness (µm) 3
AX60-A2OP Dynamic Parallelism (µm) 6.6
AX60-A2OP Motor - Type / Shaft Numbers M: 5-phase stepper high-resolution motor / ☐28 double shafts; J: 5-phase stepper motor / ☐28 double shafts
AX60-A2OP Motor - Brand / Model M: Orientalmotor / PK523HPMB; J: Orientalmotor / PKP523N12B
AX60-A2OP Driver Brand / Model Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AX60-A2OP Stage Side Connector 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AX60-A2OP Controller Side Connector 15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AX60-A2OP Origin Sensor Photoelectric sensor GMT-sensor
AX60-A2OP Limit Sensor N/A
AX60-A2OP Power Voltage 24V±10%
AX60-A2OP Control Output NPN open collector output under 24V 8mA
AX60-A2OP Output Control Testing (sensing):output transistor OFF (closed)
 

 

Multi-point repeated positioning accuracy

♦   Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦   Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

 

System Configuration Diagram

♦   For detailed specifications, please read the description for the stage and connecting cable.

♦   For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦   The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.

 

Axis Definition

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

 

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