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High-Precision Modular Temperature Controller DTDM Series
Delta‘s High-Precision Modular Temperature Controller DTDM Series adopts a highly integrated modular design for flexible configuration and expansion, offering ±0.1% high-precision temperature measurement and a 10 ms temperature sampling period. Supporting a variety of temperature control algorithms, it enables precise temperature management. The series supports the EtherCAT communication protocol to rapidly transmit the status and data of the temperature control group to the host computer.
The DTDM Series is suitable for semiconductor wafer processing equipment such as Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and Oxidation & Diffusion furnaces, silicon etching machine, and Atomic Layer Deposition (ALD).
Product Introduction
Features
Modular Design, Flexible
Expansion
Up to 32 PID loops & 128 input/output channels
A single DTDM group can connect up to 8 measurement units and 8 I/O modules. The input channels and control loops can be configured flexibly. The I/O expansion modules can be used for alarm and control outputs. Thin-type design saves installation space.
PID Cascade Control
Dual-loop control shortens response time
By linking the external and internal PID control loops, the response time is shortened. The internal loop's fast response and low latency characteristics quickly eliminate the temperature differences caused by hysteresis or disturbances between the current temperature and the set temperature, thereby achieving stable temperature control.
Feed-Forward Control
Temperature compensation for known disturbances
For temperature disturbances caused by known process behaviors, feed-forward control can provide a compensation manipulate value to the system. As soon as the process behavior is detected, temperature compensation is applied in advance to maintain temperature stability.
Linearization Table
Eliminate temperature reading error due to sensor nonlinearity
Fine compensation and calibration are performed for nonlinear temperature errors. The input lookup table provides 14 temperature calibration points and two calibration methods: breakpoints and bias compensation, to eliminate nonlinear errors of the temperature sensor or errors due to distance between measuring points and heating points.
Multi-Loop Control
Uses a single input value to control multiple channels
Suitable for multi-point temperature control applications, such as ceramic heating plates. Users only need to obtain temperature information from a single sensor to control multiple heating outputs in a customized proportion. This reduces the number of sensors needed, as well as costs and time of installation.
Status Database & Logic
Operation
Fast response time & reducing computing load for host computer
The Status Database provides various signals and the status of temperature controllers such as PV, SV, MV, DO. Users can select 4 types of signals or status and perform the Logic Operation in the temperature controller. This feature reduces response time and the computing load of the host computer.
Multi-Channel PV
Comparison & Alarm
Avoid significant temperature differences for a stable temperature
In temperature control applications with strict uniformity requirements, the DTDM series carries out simultaneous multi-channel monitoring of the process variables (PV). If the difference between PVs exceeds the threshold, an alarm is triggered and the system executes the pre-defined actions.
Input Switch-Over &
Redundancy
Creating a more accurate and reliable temperature control system
For applications with a wide temperature control range, two temperature sensors can be used, each with its own temperature range setting. The system automatically switches to the most appropriate sensor based on the measured temperature for achieving more accurate temperature measurements. Moreover, if one of the sensors fails or is disconnected, the system will automatically switch to the other one to prevent downtime.
EtherCAT Communication
Fast communication & easy integration
The module DTDM-ECAT supports EtherCAT communication, offering easy integration and flexible configurations. Featuring dual ports, it allows fast command transmission, efficient data exchange, and parameter reading/writing with the host computer and EtherCAT devices. The information gathered can also be uploaded to the host computer for further analysis. In addition, the DTDM Series' standardized EtherCAT design also accelerates the time to market.
The DTDM Series is suitable for semiconductor wafer processing equipment such as Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and Oxidation & Diffusion furnaces, silicon etching machine, and Atomic Layer Deposition (ALD).
Product Introduction
Features
Modular Design, Flexible
Expansion
Up to 32 PID loops & 128 input/output channels
A single DTDM group can connect up to 8 measurement units and 8 I/O modules. The input channels and control loops can be configured flexibly. The I/O expansion modules can be used for alarm and control outputs. Thin-type design saves installation space.
PID Cascade Control
Dual-loop control shortens response time
By linking the external and internal PID control loops, the response time is shortened. The internal loop's fast response and low latency characteristics quickly eliminate the temperature differences caused by hysteresis or disturbances between the current temperature and the set temperature, thereby achieving stable temperature control.
Feed-Forward Control
Temperature compensation for known disturbances
For temperature disturbances caused by known process behaviors, feed-forward control can provide a compensation manipulate value to the system. As soon as the process behavior is detected, temperature compensation is applied in advance to maintain temperature stability.
Linearization TableEliminate temperature reading error due to sensor nonlinearity
Fine compensation and calibration are performed for nonlinear temperature errors. The input lookup table provides 14 temperature calibration points and two calibration methods: breakpoints and bias compensation, to eliminate nonlinear errors of the temperature sensor or errors due to distance between measuring points and heating points.
Multi-Loop Control
Uses a single input value to control multiple channels
Suitable for multi-point temperature control applications, such as ceramic heating plates. Users only need to obtain temperature information from a single sensor to control multiple heating outputs in a customized proportion. This reduces the number of sensors needed, as well as costs and time of installation.
Status Database & Logic
Operation
Fast response time & reducing computing load for host computer
The Status Database provides various signals and the status of temperature controllers such as PV, SV, MV, DO. Users can select 4 types of signals or status and perform the Logic Operation in the temperature controller. This feature reduces response time and the computing load of the host computer.
Multi-Channel PV
Comparison & Alarm
Avoid significant temperature differences for a stable temperature
In temperature control applications with strict uniformity requirements, the DTDM series carries out simultaneous multi-channel monitoring of the process variables (PV). If the difference between PVs exceeds the threshold, an alarm is triggered and the system executes the pre-defined actions.
Input Switch-Over &
Redundancy
Creating a more accurate and reliable temperature control system
For applications with a wide temperature control range, two temperature sensors can be used, each with its own temperature range setting. The system automatically switches to the most appropriate sensor based on the measured temperature for achieving more accurate temperature measurements. Moreover, if one of the sensors fails or is disconnected, the system will automatically switch to the other one to prevent downtime.
EtherCAT Communication
Fast communication & easy integration
The module DTDM-ECAT supports EtherCAT communication, offering easy integration and flexible configurations. Featuring dual ports, it allows fast command transmission, efficient data exchange, and parameter reading/writing with the host computer and EtherCAT devices. The information gathered can also be uploaded to the host computer for further analysis. In addition, the DTDM Series' standardized EtherCAT design also accelerates the time to market.
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