AZ7010 - Ultra Precision

Category: Motorized Stages

Description

★ Guide-Crossed-roller Guide, In structure, V-groove and crossed roller acquire movement in high accuracy and capacity by linear transmission to act a high precision movement and load capacity performance.
★ Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★ Material-Aluminum Alloy, Stainless Steel

Model No.	Specification	Value
AZ7010-A6OP	Table Size (mm)	70 × 70
AZ7010-A6OP	Travel Stroke (mm)	10
AZ7010-A6OP	Drive Type	Ball Screw Ø8，lead 1mm
AZ7010-A6OP	Rail	Crossed-roller Bearing
AZ7010-A6OP	Stage Material / Surface Treatment	Aluminum Alloy / Black anodized
AZ7010-A6OP	Accuracy Level	OP：Ultra Precision
AZ7010-A6OP	Wiring Method	R：Right wiring (Standard)；L：Left wiring
AZ7010-A6OP	Resolution(Pulse) (µm)	M：0.25 (Full)；0.125 (Half)J：0.5 (Full)；0.25 (Half)
AZ7010-A6OP	Max. Speed(Full Step) (mm/sec)	5
AZ7010-A6OP	Positioning Precision (µm)	5
AZ7010-A6OP	Repeatability Precision(µm)	±0.5
AZ7010-A6OP	Load Capacity (Kgf)	8
AZ7010-A6OP	Missed Step (µm)	1
AZ7010-A6OP	Moment Stiffness	Pitch：0.15 / Yaw：0.05 / Rolling：0.12 ("/N-cm)
AZ7010-A6OP	Parallelism (µm)	20
AZ7010-A6OP	Dynamic Straightness (µm)	5
AZ7010-A6OP	Dynamic Parallelism (µm)	25
AZ7010-A6OP	Type / Shaft Numbers	M：5-phase stepper high-resolution motor / ☐28 double shaftsJ：5-phase stepper motor / ☐28 double shafts
AZ7010-A6OP	Brand / Model	M：Orientalmotor / PK523HPMBJ：Orientalmotor / PKP523N12B
AZ7010-A6OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AZ7010-A6OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AZ7010-A6OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AZ7010-A6OP	Power Voltage	24V±10%
AZ7010-A6OP	Control Output	NPN open collector output under 24V 8mA
AZ7010-A6OP	Output Control	Testing (sensing)：output transistor OFF (closed).
AZ7010-S6OP	Table Size (mm)	70 × 70
AZ7010-S6OP	Travel Stroke (mm)	10
AZ7010-S6OP	Drive Type	Ball Screw Ø8，lead 1mm
AZ7010-S6OP	Rail	Crossed-roller Bearing
AZ7010-S6OP	Stage Material / Surface Treatment	Stainless Steel / Nickel plating
AZ7010-S6OP	Accuracy Level	OP：Ultra Precision
AZ7010-S6OP	Wiring Method	R：Right wiring (Standard)；L：Left wiring
AZ7010-S6OP	Resolution(Pulse) (µm)	M：0.25 (Full)；0.125 (Half)J：0.5 (Full)；0.25 (Half)
AZ7010-S6OP	Max. Speed(Full Step) (mm/sec)	5
AZ7010-S6OP	Positioning Precision (µm)	5
AZ7010-S6OP	Repeatability Precision(µm)	±0.5
AZ7010-S6OP	Load Capacity (Kgf)	10
AZ7010-S6OP	Missed Step (µm)	1
AZ7010-S6OP	Moment Stiffness	Pitch：0.15 / Yaw：0.05 / Rolling：0.12 ("/N-cm)
AZ7010-S6OP	Parallelism (µm)	20
AZ7010-S6OP	Dynamic Straightness (µm)	5
AZ7010-S6OP	Dynamic Parallelism (µm)	25
AZ7010-S6OP	Type / Shaft Numbers	M：5-phase stepper high-resolution motor / ☐28 double shaftsJ：5-phase stepper motor / ☐28 double shafts
AZ7010-S6OP	Brand / Model	M：Orientalmotor / PK523HPMBJ：Orientalmotor / PKP523N12B
AZ7010-S6OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AZ7010-S6OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AZ7010-S6OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AZ7010-S6OP	Power Voltage	24V±10%
AZ7010-S6OP	Control Output	NPN open collector output under 24V 8mA
AZ7010-S6OP	Output Control	Testing (sensing)：output transistor OFF (closed).

Multi-point repeated positioning accuracy

♦ Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦ Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

System Configuration Diagram

♦ For detailed specifications, please read the description for the stage and connecting cable.

♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.