AXG6-Ultra Precision

Category: Motorized Stages

Description

★Ball screw.
★Transmission position: central
★High rigidity.
★Durable.

Model No.	Specification	Value
AXG6-50VMC-2OP	Table Size (mm)	60 × 60
AXG6-50VMC-2OP	Travel Stroke (°)	±8.5
AXG6-50VMC-2OP	Drive Type	Ball Screw Ø8
AXG6-50VMC-2OP	Rail	Crossed-roller Bearing
AXG6-50VMC-2OP	Stage Material / Surface Treatment	Aluminum Alloy / Black anodized
AXG6-50VMC-2OP	Accuracy Level	OP：Ultra Precision
AXG6-50VMC-2OP	Wiring Method	R : Right wiring (Standard)；L : Left wiring
AXG6-50VMC-2OP	Resolution(Pulse) (°)	M: 0.001 (Full)；0.0005 (Half) / J: 0.002 (Full)；0.001 (Half)
AXG6-50VMC-2OP	Max. Speed(Full Step) (°/sec)	10
AXG6-50VMC-2OP	Positioning Precision (°)	0.03
AXG6-50VMC-2OP	Repeatability Precision(°)	±0.003
AXG6-50VMC-2OP	Load Capacity (Kgf)	5
AXG6-50VMC-2OP	Missed Step	< 0.003°
AXG6-50VMC-2OP	Moment Stiffness	Pitch: 0.3 / Yaw: 0.12 / Rolling: 0.15 ("/N-cm)
AXG6-50VMC-2OP	Height of Center Rotation (mm)	50 ± 0.1
AXG6-50VMC-2OP	Accuracy of Center Rotation	< 0.01 mm
AXG6-50VMC-2OP	Motor - Type / Shaft Numbers	M: 5-phase stepper high-resolution motor / ☐28 double shafts; J: 5-phase stepper motor / ☐28 double shafts
AXG6-50VMC-2OP	Motor - Brand / Model	M: Orientalmotor / PK523HPMB; J: Orientalmotor / PKP523N12B
AXG6-50VMC-2OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AXG6-50VMC-2OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AXG6-50VMC-2OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AXG6-50VMC-2OP	Origin Sensor	Photoelectric sensor GMT-sensor
AXG6-50VMC-2OP	Limit Sensor	Origin Approximation Sensor
AXG6-50VMC-2OP	Limit Sensor	N / A
AXG6-75VMC-2OP	Table Size (mm)	60 × 60
AXG6-75VMC-2OP	Travel Stroke (°)	±6
AXG6-75VMC-2OP	Drive Type	Ball Screw Ø8
AXG6-75VMC-2OP	Rail	Crossed-roller Bearing
AXG6-75VMC-2OP	Stage Material / Surface Treatment	Aluminum Alloy / Black anodized
AXG6-75VMC-2OP	Accuracy Level	OP：Ultra Precision
AXG6-75VMC-2OP	Wiring Method	R : Right wiring (Standard)；L : Left wiring
AXG6-75VMC-2OP	Resolution(Pulse) (°)	M: 0.00071 (Full)；0.000355 (Half) / J: 0.00142 (Full)；0.00071 (Half)
AXG6-75VMC-2OP	Max. Speed(Full Step) (°/sec)	7.1
AXG6-75VMC-2OP	Positioning Precision (°)	0.03
AXG6-75VMC-2OP	Repeatability Precision(°)	±0.003
AXG6-75VMC-2OP	Load Capacity (Kgf)	5
AXG6-75VMC-2OP	Missed Step	< 0.003°
AXG6-75VMC-2OP	Moment Stiffness	Pitch: 0.3 / Yaw: 0.12 / Rolling: 0.15 ("/N-cm)
AXG6-75VMC-2OP	Height of Center Rotation (mm)	75 ± 0.1
AXG6-75VMC-2OP	Accuracy of Center Rotation	< 0.01 mm
AXG6-75VMC-2OP	Motor - Type / Shaft Numbers	M: 5-phase stepper high-resolution motor / ☐28 double shafts; J: 5-phase stepper motor / ☐28 double shafts
AXG6-75VMC-2OP	Motor - Brand / Model	M: Orientalmotor / PK523HPMB; J: Orientalmotor / PKP523N12B
AXG6-75VMC-2OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AXG6-75VMC-2OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AXG6-75VMC-2OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AXG6-75VMC-2OP	Origin Sensor	Photoelectric sensor GMT-sensor
AXG6-75VMC-2OP	Limit Sensor	Origin Approximation Sensor
AXG6-75VMC-2OP	Limit Sensor	N / A
AXG6-100VMC-2OP	Table Size (mm)	60 × 60
AXG6-100VMC-2OP	Travel Stroke (°)	±5
AXG6-100VMC-2OP	Drive Type	Ball Screw Ø8
AXG6-100VMC-2OP	Rail	Crossed-roller Bearing
AXG6-100VMC-2OP	Stage Material / Surface Treatment	Aluminum Alloy / Black anodized
AXG6-100VMC-2OP	Accuracy Level	OP：Ultra Precision
AXG6-100VMC-2OP	Wiring Method	R : Right wiring (Standard)；L : Left wiring
AXG6-100VMC-2OP	Resolution(Pulse) (°)	M: 0.00055 (Full)；0.000275 (Half) / J: 0.0011 (Full)；0.00055 (Half)
AXG6-100VMC-2OP	Max. Speed(Full Step) (°/sec)	5.4
AXG6-100VMC-2OP	Positioning Precision (°)	0.03
AXG6-100VMC-2OP	Repeatability Precision(°)	±0.003
AXG6-100VMC-2OP	Load Capacity (Kgf)	5
AXG6-100VMC-2OP	Missed Step	< 0.003°
AXG6-100VMC-2OP	Moment Stiffness	Pitch: 0.3 / Yaw: 0.12 / Rolling: 0.15 ("/N-cm)
AXG6-100VMC-2OP	Height of Center Rotation (mm)	100 ± 0.1
AXG6-100VMC-2OP	Accuracy of Center Rotation	< 0.01 mm
AXG6-100VMC-2OP	Motor - Type / Shaft Numbers	M: 5-phase stepper high-resolution motor / ☐28 double shafts; J: 5-phase stepper motor / ☐28 double shafts
AXG6-100VMC-2OP	Motor - Brand / Model	M: Orientalmotor / PK523HPMB; J: Orientalmotor / PKP523N12B
AXG6-100VMC-2OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AXG6-100VMC-2OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AXG6-100VMC-2OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AXG6-100VMC-2OP	Origin Sensor	Photoelectric sensor GMT-sensor
AXG6-100VMC-2OP	Limit Sensor	Origin Approximation Sensor
AXG6-100VMC-2OP	Limit Sensor	N / A
AXG6-125VMC-2OP	Table Size (mm)	60 × 60
AXG6-125VMC-2OP	Travel Stroke (°)	±4
AXG6-125VMC-2OP	Drive Type	Ball Screw Ø8
AXG6-125VMC-2OP	Rail	Crossed-roller Bearing
AXG6-125VMC-2OP	Stage Material / Surface Treatment	Aluminum Alloy / Black anodized
AXG6-125VMC-2OP	Accuracy Level	OP：Ultra Precision
AXG6-125VMC-2OP	Wiring Method	R : Right wiring (Standard)；L : Left wiring
AXG6-125VMC-2OP	Resolution(Pulse) (°)	M: 0.00044 (Full)；0.00022 (Half) / J: 0.00088 (Full)；0.00044 (Half)
AXG6-125VMC-2OP	Max. Speed(Full Step) (°/sec)	4.4
AXG6-125VMC-2OP	Positioning Precision (°)	0.03
AXG6-125VMC-2OP	Repeatability Precision(°)	±0.003
AXG6-125VMC-2OP	Load Capacity (Kgf)	5
AXG6-125VMC-2OP	Missed Step	< 0.003°
AXG6-125VMC-2OP	Moment Stiffness	Pitch: 0.3 / Yaw: 0.12 / Rolling: 0.15 ("/N-cm)
AXG6-125VMC-2OP	Height of Center Rotation (mm)	125 ± 0.1
AXG6-125VMC-2OP	Accuracy of Center Rotation	< 0.01 mm
AXG6-125VMC-2OP	Motor - Type / Shaft Numbers	M: 5-phase stepper high-resolution motor / ☐28 double shafts; J: 5-phase stepper motor / ☐28 double shafts
AXG6-125VMC-2OP	Motor - Brand / Model	M: Orientalmotor / PK523HPMB; J: Orientalmotor / PKP523N12B
AXG6-125VMC-2OP	Driver Brand / Model	Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
AXG6-125VMC-2OP	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
AXG6-125VMC-2OP	Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
AXG6-125VMC-2OP	Origin Sensor	Photoelectric sensor GMT-sensor
AXG6-125VMC-2OP	Limit Sensor	Origin Approximation Sensor
AXG6-125VMC-2OP	Limit Sensor	N / A

Multi-point repeated positioning accuracy

♦ Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦ Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

System Configuration Diagram

♦ For detailed specifications, please read the description for the stage and connecting cable.

♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.