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★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
★ 3D CMM- Ensure the quality and precision of the stage.
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Model No. |
GAS00-160LC-PN |
GAS00-160LC-UPJ |
GAS00-160EC-PN |
GAS00-160VC1-PN |
GAS00-160VC1-UPJ |
GAS00-190EC-PN |
GAS00-190EC-UPJ |
GAS00-190HC-PN |
GAS00-190HC-UPJ |
GAS00-200HC-PN |
GAS00-200HC-UPJ |
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Stage Size (mm) |
160x160 |
160x160 |
160x160 |
160x160 |
160x160 |
190x190 |
190x190 |
190x190 |
190x190 |
200x200 |
200x200 |
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Base Size (mm) |
170x170 |
170x170 | 170x170 | 170x170 | 170x170 | 210x210 | 210x210 | 210x210 | 210x210 | 210x210 | 210x210 |
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Height (mm) |
50 |
50 | 50 | 55 | 55 | 65 | 65 | 65 |
65 |
60 |
60 |
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Travel Stroke (mm) |
±3x±3 | ±3x±3 | ±3x±3 | ±9x±9 | ±9x±9 | ±4x±4 | ±4x±4 | ±4x±4 | ±4x±4 | ±7x±7 | ±7x±7 |
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Angle (θ)° |
±2° | ±2° | ±2° | ±8.5° | ±8.5° | ±3° | ±3° | ±3° | ±3° | ±3° | ±3° |
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Stage Material |
Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel | Carbon Steel |
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Stage Surface Treatment |
Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished | Black Finished |
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Base Material |
Duralumin | Duralumin | Duralumin | Carbon Steel | Carbon Steel | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
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Base Surface Treatment |
Black Anodized | Black Anodized | Black Anodized | Black Oxide | Black Oxide | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
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Ball Screw Spec. |
Ø6-P1 | Ø6-P1 | Ø6-P1 | Ø6-P1 | Ø6-P1 | Ø6-P1 | Ø6-P1 | Ø6-P1 |
Ø6-P1 |
Ø8-P1 |
Ø8-P1 |
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Dynamic Load Capacity (kgf) |
30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 |
30 |
60 |
60 |
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Static Load Capacity (kgf) |
60 | 60 | 60 | 120 | 120 | 60 | 60 | 65 |
65 |
130 |
130 |
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Repeatability Accuracy (μm) |
±5 | ±1 | ±5 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 |
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Parallelism (μm) |
30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 |
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Motor Brand |
GMT | Oriental | GMT | GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental |
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Motor Type |
2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper |
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Motor Shaft |
□28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □28 Double Shaft | □42 Double Shaft | □42 Double Shaft |
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Motor Model. No. |
2MS- N28D32 A |
PKP523 N12B |
2MS- N28D32 A |
2MS- N28D32 A |
PKP523 N12B |
2MS- N28D32 A |
PKP523 N12B |
2MS- N28D32 A |
PKP523 N12B |
2MS- N42D47 A |
PKP544 N18B |
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Driver Brand |
Contact us | Oriental | Contact us | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental |
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Driver Model. No. |
Contact us |
CVD512 -K |
Contact us | Contact us |
CVD512 -K |
Contact us |
CVD512 -K |
Contact us |
CVD512 -K |
Contact us |
CVD518 -K |
| Characteristics |
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♦ Ultra thin appearance Achieved with the lighted crossed roller bearings and modularized structures. ♦ High stiffness and high precision Applying preload operations on every roller bearings of stages for better rigidity and precision. ♦ Hollow structure Lightweight structure of the stages could be suitable for optical inspection devices. ♦ Lubrication system Well lubricating gives the stages longer using life and reliable accuracy. ♦ Genericity Available sizes from 160mm to 1500mm, even capable of heightening load resistance by adding driven modules. |
| Applications |
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♦ Panel lamination machinery ♦ Panel film laminating machines ♦ Print screen and 3D printing ♦ Angular glass cutting and grinding equipment ♦ Wafe alignment equipment ♦ P.C.D exposure equipment ♦ Software cutting equipment ♦ Semi-conductor equipment |
Structures and Lubrication System |
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Transmission Theory |
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Inquiry - Alignment Stage-GAS00 Series
